Novel concept for a Monolithically Integrated MEMS VCSEL

We present a novel concept of a fully Monolithically Integrated MEMS VCSEL structure, called MIMS VCSEL. Its both components, the laser active medium and the electro-thermally tuned membrane on top show excellent values. The combination of the developed high-power laser showing 6.7 mW at 20°C and 3 mW at 80°C, respectively, with a widely tunable, high speed membrane (minimum bending values of 1.8 μm and tuning frequencies within 3-14 kHz) are perfect starting conditions for VCSEL devices with an aimed tuning range beyond 100 nm.