Very-high-Q solenoid RF inductors for SiP LTCC integration

Summary form only given, as follows. Design and fabrication of radio frequency inductors in multi-layer Low Temperature Cofired Ceramic (LTCC) materials are discussed and experimental results are presented. Compact high-Q three-dimensional inductor topologies have been designed to achieve high quality factor (Q 75) and high self-resonance frequency (SRF 4.5 GHz) with inductance-value between 2–7 nH at 2 GHz. The inductors were made using the lowest possible number of LTCC layers.