Silicon on insulator photonic integrated sensors: On-chip sensing and interrogation

In this paper, we present two examples of photonic sensors based on ring resonators in Silicon-on-Insulator (SOI) waveguide technology as mass production compatible sensing units for the measurement of: strain, and ultrasound. Furthermore, the sensing units are characterized in extreme conditions to validate their robustness in harsh industrial environments. In addition, the monitoring of these sensing units is presented as an application of an on-chip 3×3 interferometer.