A new approach of a shape-optimized piezoelectric MEMS generator for fluid-actuated energy scavenging

In this paper a new approach of a shape-optimized piezoelectric MEMS generator for fluid-actuated energy scavenging is presented. Different energy scavenging scenarios are introduced. Depending on the specific load scenario optimum piezoelectric cantilever shapes are investigated. A point load at the free-end of a cantilever requires a triangular cantilever shape. Compared to a classical rectangular shape the electrical area energy density is three times larger. A maximum area energy density value of 35 nJ/mm² is measured for the triangular cantilever shapes. A uniform load as occurring for fluid-actuated energy harvesting calls for a triangular-curved cantilever shape and is also superior to classical geometries.