A micro energy harvester with 3D wire bonded microcoils

We developed the first micro energy harvester with optimized wire bonded microcoils. The coils were fabricated with a fully automated process on PCB. The 3D coils enable to effectively use the magnetic field and generate an output power of 0.62 μW at 1 ms
^-2
within a total harvester volume of 0.46 cm
³
. With the coil wire thickness of only 25 μm this corresponds to the high load voltage of 10.4 mV. The results evidence that this approach can help developing high performance energy harvesters with an increased output voltage.