A flat high performance micro energy harvester based on a serpentine coil with a single winding

We introduce a flat micro energy harvester with a volume of 0.9 cm
³
and a height of 3 mm. The combination of multiple magnetic circuits enhancing each others flux and one serpentine coil with a single winding and an effective copper filling factor of 100 % enables to maximize the output power. With a first prototype an average power of 12 μW
_avg
at 1 ms
^-2
was generated. Our approach evidences that high power can be realized even with flat harvesters, although they typically suffer from high mechanically damping.