An active matrix arrayed microphone with acoustic bandwidth response

A monolithic integration of organic thin film transistors and piezoelectric sheet material is demonstrated to form an active matrix piezoelectric microphone. The localized acoustic wave detection is enabled by the switch transistors of the active matrix architecture, and the piezoelectric voltage response induced by acoustic wave excitation is amplified by the organic transistors that are monolithically integrated with the piezoelectric sheet material. The frequency of detection ranges to 15KHz because the switching speed of the transistors is fast enough to switch up to this frequency.