AlN based piezoelectric force sensor for energy autonomous sensor systems

This work deals with the design development and test of an AlN based force sensor for an energy autonomous monitoring system. An AlN thin film on an Al
₂
O
₃
substrate is used as a piezoelectric layer in the sensor system and produces the necessary energy for its operation. Sputtered molybdenum and aluminium layers are used as lower and upper sensing electrodes, respectively. The effects of AlN thickness, electrode thickness, and electrode surface modification on AlN piezoelectric properties are measured. Si
₃
N
₄
is used to enhance the piezoelectric properties of AlN. Linearity, temperature dependence and repeatability of the sensor are measured and characterised.