W-band measurements of 100 /spl mu/m height micro-machined air-filled rectangular waveguides

The first S-parameter measurements of micro-machined 100 /spl mu/m high air-filled rectangular waveguides are reported, which have been performed at W-band using a specially designed test fixture connected to a standard vector network analyser. The results obtained show low loss and demonstrate propagation in TE/sub 10/ mode.