Simulation of MEMS based micro-gyroscope using CoventorWare

This paper presents the design and simulation of MEMS based micro-gyroscope to be used in digital camera for image stabilization. Simulation has been performed using CoventorWare. Proposed model of gyroscope has improved the performance and structure for small vibration amplitude to minimize the mechanical crosstalk. Results show that the capacitance in sense mode, which is detected by variable-gap capacitors, is equal to 2.68 pF in each side of sense mode. Oscillations in drive and sense electrodes with 1-DOF and proof mass with 2-DOF make sure that the proposed model has no common mode, that causes mechanical crosstalk. Damping effect for slide thin film and squeezed thin film has been studied. The presented data provides useful information to fabricate the optimal design of MEMS based micro gyroscope.