Poly-Silicon gate pre-doping implantation impact on MOSFET matching performances

This paper demonstrates how poly-Silicon gate pre-doping implantation impacts MOS matching performances. Measurements are performed on test structures (MOS pairs / capacitors) and analog circuits, using five different processes with pre-doping implantation energy variation (from 35 to 10 KeV) and tilt variation (7° and 25°). TCAD simulations validate a channel counter-doping due to high pre-doping implantation energy causing mismatch degradation.