Effect of Electron Heating Mode on Charge-Up Damage in Dual-Frequency Capacitive Discharges

In dual-frequency capacitive discharges, the effect of electron heating mode on charge-up damage is investigated through a 3-D charge-up simulator coupled with a 1-D particle-in-cell Monte Carlo collision simulation. The local charge-up damage on the trench decreases as the electron heating mode is changed from collisionless to collisional heating.