The lifetime distribution of excess carriers in H/sup +/ ion implanted silicon by photoconductive frequency resolved spectroscopy

This paper reports a photoconductive frequency resolved spectroscopy study of the excess carrier lifetime distributions in device grade silicon subjected to hydrogen implantation to achieve proximity gettering of heavy metal impurities. Carrier lifetime distributions have been obtained for various processing conditions and over a wide range of measurement temperatures. The lifetime distributions are initially complex and found to be dominated by trapping effects. Samples that have been implanted and subsequently annealed show a simpler lifetime distribution with a single carrier recombination time of 5 /spl mu/S from which we conclude that significant gettering has been achieved.