Ion source improvement program for the Varian VIISion ion implanter

In our continuous program of ion source improvement, we have two main goals in mind. First and foremost is improving lifetime consistency, and identifying factors that increase lifetime such as optimizing arc voltage. Results of numerous lifetime studies at Varian and at Micron are presented. We assess the pros and cons of filament insulators (presently there are no insulators). Test results are presented, along with their effect on gas flow. We are also focusing on improving the repeller design and assembly technique, and gas feed modifications. Results of these investigations are presented.