10 GHz range low loss wide band unidirectional SAW filters using sub-0.1-/spl mu/m width narrow-gap electrodes

It is very important to develop SHF range SAW devices for high density electrical communication systems. One of the most important terms of SHF range SAW devices is to develop a low loss unidirectional SAW transducer which has high efficiency defined by 1/Q (=G//spl omega/C). Moreover, the ultrasmall fabrication process for less than 0.1 /spl mu/m electrodes are required. In this paper, SHF range low loss wide band SAW filters using narrow-gap type unidirectional transducers which have high efficiency are investigated. The transducers are constructed by /spl lambda//4 electrodes, and the width is about 0.06 /spl mu/m in 15 GHz range. The results show a 4 dB insertion loss in 5 GHz range and 9 dB in 10 GHz range. Moreover, the frequency response of the 15 GHz range SAW filter is obtained.