Gas sensing with acoustic devices

A survey is made of acoustic devices that are suitable as gas and vapor sensors. This survey focuses on attributes such as operating frequency, mass sensitivity, quality factor (Q), and their ability to be fabricated on a semiconductor substrate to allow integration with electronic circuitry. The treatment of the device surface with chemically-sensitive films to detect species of interest is discussed. Strategies for improving discrimination are described, including sensor arrays and species concentration and separation schemes. The advantages and disadvantages of integrating sensors with microelectronics are considered, along with the effect on sensitivity of scaling acoustic gas sensors to smaller size.