Si IC-compatible inductors and LC passive filters

Passive inductors and LC filters fabricated in standard Si IC technology are demonstrated. Q-factors from three to eight and inductors up to 10 nH in the gigahertz range have been realized. Measurements on a five-pole maximally flat low-pass filter give midband insertion loss and -3 dB bandwidth close to the nominal design values of 2.25 dB and 880 MHz.<
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