A decade of MEMS and its future

This paper deals with a history of microelectromechanical system (MEMS) development in this decade. An overview of the MEMS research topics is also given. The topics include microactuators, microsensors, micro miniature motion-systems (e.g. microrobots), applications and the fabrication technology in involved. MEMS is supposed to contribute the 21th Century society in three major areas such as (1) wider distribution of and easier access to information, (2) compatible lifestyle with environment and (3) improvement in social welfare. The technological issues for future development of MEMS are discussed.