Simultaneous extraction of threshold voltage and mobility degradation from on-the-fly NBTI measurements

Conventional on-the-fly characterization of NBTI translates measured changes in drain current to a threshold voltage shift only. In this paper, we show how to extend this method to the simultaneous determination of threshold voltage and zero-field-mobility degradation by. This is achieved by using a Vector Network Analyzer for OTF characterization of g
_ds
and g
_m
. For the technology under study, we have found that degradation in the zero-field mobility is responsible for at most 10% of the drain current change. Effective mobility, on the other hand, does change as a direct consequence of the threshold-voltage shift.