Design of a NEMS based LC oscillation circuit for tiny vibration determination

A novel design of NEMS resonator based LC oscillation circuit for detection of tiny vibration is proposed. The relationship between the tiny vibration of the NEMS resonator beam and the frequency of LC oscillation is analyzed. With the resonator as the part of the LC oscillation, IC compatible processes based oscillation circuit are conceived and simulated. The simulation result demonstrates the oscillation bandwidth is 1.75MHz under the 2nm NEMS beam vibration amplitude.