Design, simulation, modeling and characterization of micromachined microcantilever using coventorware software

Modeling and simulation of a microcantilever designed to achieve high resonant frequency on the sensing area is presented in this paper. Simple analytical models of the microcantilever are generated to achieve estimates of the device performance and to check the validity of the subsequent simulation. CoventorWare simulation software is used to design and process the micromachined microcantilever gas sensing platforms. Results indicate that with a periodic force of amplitude 0.05 N applied at the top of microcantilever, increasing its thickness from 1 µm to 5 µm increases the natural frequency from 10.203 KHz to 50.709 KHz. On the other hand an increase in the lengths of the microcantilever from 90 µm to 170 µm decreases its natural frequency from 30.437 KHz to 17.70 KHz, while increasing its widths from 60 µm to 140 µm increases its natural frequency from 23.854 KHz to 35.84 KHz. A comparison between simulation and mathematical model results for frequency showed close agreement.