Research of three-axis vibration sensor and calibration method based on MEMS

Aerocraft flight test for multiple directions of vibration signals, we designed a three-axis MEMS-based vibration sensor. Paper-based three-axis MEMS vibration sensor starting the design process, detailed design of the whole process of the sensor. Highlighted in the design process should pay attention to the issues and practical applications for the sensor issues arising in the corresponding calibration methods to ensure the reliability of the sensor, and in practical applications with satisfactory results.