Electromagnetic inertial microgenerators for vibrational energy scavenging: Implementation of a Si technology based modular process for optimised

Electromagnetic (em) inertial microgenerators are an interesting alternative to batteries for powering of advanced autonomous microsystems. These devices are well suited for harvesting of mechanical energy from vibrations induced by operating machines. The fabrication of these devices has been made with a Si technology based modular process where the em converter and the resonator are micromachined separately. The data obtained show the ability of these prototypes to generate power levels in the range of 50 muW's and output voltages in the range of hundreds of mV.