Micro fluidic circuit design with “spice” simulation

This paper reports an innovative design methodology of micro fluidic integrated circuits based on the CAD system of electronic circuit design. The “SPICE” program which is the most common circuit simulator in the LSI technology is applied to design micro fluidic circuits in this study. Pneumatic microvalves (pneumatic-FETs) are the active devices in the fluidic circuits, and its SPICE model is required for circuit simulation. The simulation results using the established SPICE model showed very good agreement with the characteristics of the measured circuits. This paper is the first successful demonstration of SPICE simulation in micro fluidic circuits design.