Fe-B-Nb-Nd Magnetic metallic glass thin film for MEMS/NEMS structure

This paper presents characteristics of Fe-B-Nb-Nd magnetic metallic glass thin film (MGTF) which is greatly desired for MEMS/NEMS devices. The advantages of the Fe-B-Nb-Nd MGTF include high robustness and soft magnetic property. In our study, we have measured the film characteristics such as structure, surface morphology, hardness, elastic modulus, internal stress, and soft magnetic property. We also report a fabrication process of freestanding micro-cantilevers using this Fe-B-Nb-Nd MGTF for a vibration based micro energy harvester by micromachining techniques.