A shielded cantilever-tip microwave probe for micro/nano surface imaging of conductive properties

This paper reports an electromagnetic shielded cantilever-tip microwave-probe for conductive-property imaging at micro/nano surface-area. Equipped with an ultra-sharp tip apex (<;50 nm), the probe features small conducting path resistance of R
_s
<;5Ω and conducting path-to ground capacitance of C
_tip
≈1pF. These optimal-designed parameters facilitate satisfactory spatial resolution and microwave-signal intensity during probing test. The fabrication method is low-cost and suitable for batch-fabrication.