A study of multiple objectives real-time dispatcher for wafer fabrication

This paper proposes a FUZZY-based approach to solve three main issues on multiple-objectives real-time dispatcher development for wafer fabrication. The first one is determining proper priority index for each lot. The second one is providing methods for setting stage move targets. The third oneis developing practical system to perform real-time dispatcher for specific area. The study of dispatching optimization that provides positive support for related researches of production planning, scheduling, dispatching and control in the semiconductor manufacturing field.