Integration of photonic sensor array with GeSi photo-detectors for multiplexing detection

A approach of using high performance Ge photo-detectors (PD) integrated with Si waveguide based microresonators for multiplexing detection has been proposed. Simultaneous measurement of the resonance curves of sensor array using this approach has been demonstrated. The resonance peaks of integrated sensor array show good correlation (R2=0.9979) with that of normal resonator, proving the feasibility of this approach for multiplexed bio-sensing application.