A phase-change via-reconfigurable on-chip inductor

This paper describes a new approach to the realization of reconfigurable CMOS-compatible RF inductors using programmable vias made from phase-change (PC) materials. Reversible reconfiguration of a custom-fabricated inductor prototype is demonstrated using voltage pulses to transform (by Joule heating) the PC switch between crystalline (ON) and amorphous (OFF) states. The RF performance shows an inductance of 1.9 (0.9) nH at 2 (5) GHz with quality factor (Q) of 12.4 (5.8) in the OFF (ON) state.