Characterisation and device applications of ZnxMg1−xO films grown by pulsed laser deposition

Zn
x
Mg
1−x
O films have been deposited using pulsed laser deposition (PLD) onto a-plane sapphire substrates and incorporated into ultraviolet sensors based on IrO/ Zn
x
Mg
1−x
O Schottky barrier contacts. Electron diffraction showed that the films were highly crystalline with low surface roughness. Atomic force micros-copy showed this roughness to be <2% of the film thickness. The IrO
x
/Zn
x
Mg
1−x
O Schottky devices exhibited good rectification (barrier heights ∼0.88 eV and ideality factors ∼1.7) and UV sensing capability.