Characteristics of indium-tin-oxide thin films deposited by e-beam evaporator at high-temperature

Transparent electrically conducting thin films are particularly attractive and are receiving increased interest in applications such as liquid crystal displays, transparent electrodes for solar cells, and light-emitting diodes(LED). In particular, Indium tin oxide (ITO) films have been studied in view of the practical performance of their electrical and optical properties to meet the increasing requirements of advanced technologies. However, most of blue LED ITO film for transmittance electrodes was being researched expensive sputtering method.