Equivalent-circuit model for electrostatic micro-torsion mirror

An equivalent circuit model for micro-torsion mirror is reported, which uses open-source circuit simulator Qucs and demonstrated mixed simulation between micro mechanics and electrical circuit. In the simulation, electrostatic force, equation of motion, and Kirchhoff s law are considered. Mathematical operation in the equation of motion is interrupted as an electrical capacitor, so that a seamless multi-physics mixed simulation becomes possible.