'ab initio' surface roughness scattering in 3D Monte Carlo transport simulations

Density gradient quantum corrected 3D Monte Carlo simulation of electron inversion layer transport is carried out in the presence of a statistically accurate discrete rough surface. Surface roughness scattering is included in all simulations not through a scattering rate or boundary condition model, but through the direct propagation of carriers in the effective quantum potential associated with the unique surface. Calibration of the statistical surface and density gradient effective mass parameters allows excellent agreement with experimental universal mobility measurements.