Multi-axis integrated CMOS-MEMS inertial sensors

Multi-axis integration of inertial sensors is crucial for portable electronics. This paper presents a DRIE CMOS MEMS process that is capable of realizing lateral and vertical sensing comb drives. An integrated 3-axis accelerometer and an integrated 5-axis inertial measurement unit including a 3-axis accelerometer, a z-axis gyroscope and an x/y gyroscope are also introduced.