A generic monolithically integrated micromechanic optic sensor (MIMOS)

This paper addresses an innovative optical scheme to detect ultrafine motions of micromechanical structures, as a generic design for a whole class of sensors including accelerometers, gyroscopes, position sensors, etc.. We fabricated a monolithically integrated micromechanic optic sensor (MIMOS) on a Si substrate. The device consists of two superimposing gratings with a small angle and an array of photodetectors.