Optical properties of ErxYb2−xSi2O7 thin film grown by RF magnetron sputtering method

Er
x
Yb
2−x
Si
2
O
7
thin films are synthesized on thermally oxidized n-Si substrates by RF-magnetron co-sputtering and subsequent annealing process. The photoluminescence properties of Er
x
Yb
2−x
Si
2
O
7
thin films with 488 nm and 974 nm pumping lasers have been investigated.