Aerosol printed conductors for miniaturized LTCC packaging

For miniaturized electronic packages in low temperature co-fired ceramics (LTCC) aerosol printing technology was used to deposit conductor lines with a microscaled silver ink. A DoE (Design of Experiments) method was used to identify significant process parameters and to optimize the quality of the deposited films. The results showed that there is a high percentage of interaction between the gas flows and the deposition rate on the width of the line. The electric characteristics (R
_sqr
, TCR) as well as the microstructure of the aerosol printed, co-fired inner conductors were investigated and are comparable to screen printed conductor lines.