X-Y positioner driven by electrostatic motor

An X-Y positioner driven by an electrostatic motor named the dual excitation electrostatic motor was developed. Unique configuration of the positioner utilizing a characteristic of the motor balances inertia mass in the two axes to achieve good dynamic characteristics of the positioner. A prototype positioner was fabricated and tested. The prototype generated a thrust force of approximately 35 N in each axis, and a positioning resolution of 200 /spl mu/m was obtained. To improve the resolution, the electrode structure of the motor was modified, and very smooth motion was obtained.