Process Parameters of Mold Fabrication for Nano-Imprint Lithography

In nano-imprint lithography, PDMS is chosen to be soft mold material, which has features of excellent demolding character and large transferring area of imprinting pattern. Besides, the soft mold uses quartz as substrate. Impacts of technical parameters, such as the vacuum casting pressure, the curing temperature and time, on PDMS performance are analyzed. The experiments results show that the vacuum pressure is 2.3 × 10^-2 Pa; the curing temperature is 40°C, and the curing time is 45 hours. These optimized parameters keep adequate demold and pattern accuracy, thus adoption of PDMS soft mold could not only fulfill the precision NIL process, but also improve productivity.