A low-power high-performance accelerometer ASIC for high-end medical motion sensing

A 170μW readout IC for a capacitive MEMS acceleration sensor was implemented in a 1.5V 0.13μm CMOS for high-end medical motion sensing applications. The accelerometer achieves a 45μg/vHz noise floor and a dynamic range larger than 87dB for a 400Hz bandwidth. Power reduction is achieved by introducing reset and common-mode feedback circuit techniques based on a non-unity-gain feedback configuration.