Crystalline silicon solar cells with doped epitaxial silicon films obtained at low-temperature by PECVD

In spite of dramatic improvements in thin film technologies, crystalline silicon (c-Si) solar cells are still leading the photovoltaic market thanks to continuous progress. In this field, one innovative way is the development of thin silicon epitaxial films (epi-Si) on (100) c-Si wafers to fabricate the emitter and/or back surface field of solar cells. Among the possible techniques, we used radio-frequency plasma enhanced chemical vapor deposition (rf-PECVD) for it is a low thermal budget, scalable, wide-spread process in photovoltaics and it is well-suited to make solar cells on thin c-Si wafers (< 150 µm) without too much stress induced.