Uncooled suspended bolometers based on La0.7Sr0.3Mn03 thin films

We report our results on uncooled La
_0.7
Sr
_0.3
MnO
₃
(LSMO) suspended bolometers fabricated using silicon micromachining techniques. Suspended LSMO bridges showed very low effective thermal conductance (~10
^-7
W K
^-1
) and very low NEP value (~ 1 pW Hz
^-1/2
) at 300K.