Precision motion control of a nano stage using repetitive control and double-feedforward compensation

This article presents precision motion control of an XY nano stage using repetitive control and double-feedforward compensation. The XY nano stage is composed of two piezoelectric actuators within a leaf spring mechanism. This study applies a repetitive controller and a Proportional-Integral-Derivative controller to achieve precision trajectory tracking. Moreover, the investigation applies a double-feedforward compensation approach that integrates a Zero-Phase-Error-Tracking-Controller, based on an inverse Prandtl-Ishlinskii model, to improve tracking control performance further. Performance analysis and comparison with experimental results demonstrate that the proposed control structure improves dynamic tracking accuracy of the XY nano stage.