Micro capacitive vacuum sensor based on MEMS

In this paper, we describe the development process of the micro capacitive vacuum sensor Based on MEMS. The sensor mainly uses the p+ silicon etching automatically stops and anodic bonding technology, the formation of glass - silicon - glass sandwich structure. The micro-vacuum sensor with a simple structure, high sensitivity, its size is 5 mm × 6.4 mm. The vacuum sensor measuring range is 5 × 10 - 3 ~ 6 × 10 - 2 Pa, the linearity of 5.9%, sensitivity and relatively stable.