Fabrication and performance analysis of an amorphous silicon-based thermal IR detector

In this paper, an amorphous Si-based thermal infrared detector with an improved responsivity and optimized structure is reported. Using Finite Element Analysis (FEA) simulation, the length and structure of the leg to extend sensing area are designed to minimize the heat loss of uncooled bolometric amorphous Si-based thermal infrared detector. The thermal infrared detector is fabricated using microelectro mechanical system (MEMS) technology and the operating performances of thermal infrared detector are analyzed and compared with conventional thermal infrared detectors.