A continuous-time voltage readout for SiC micromechanical capacitive pressure sensor

This paper presents a CMOS capacitive sensing amplifier for a SiC MEMS capacitive pressure sensor. Noise performance and noise optimization studied from a theoretical point of view. This amplifier is a differential difference amplifier (DDA) with optimal transistor sizing to minimize sensor noise floor. The simulation result shows that the circuit can obtain a stable and linear voltage, and Continuous-Time Voltage is an ideal choice compared to other method for sensing ultra-small capacitance change of the MEMS sensors.