Development of a Reliable Micro-Hotplate With Low Power Consumption

In this paper, a reliable micro-hotplate with low power consumption is demonstrated by optimizing its structure and materials. Its power consumption is successfully decreased by adopting a structure with two high length-to-width slender beams. High reliability is achieved by improving its mechanical strength and long-term stability. A stacked membrane with residual stress controlled and corner compensations improve its mechanical strength. Pt heater element and
${\rm Al}_{2} {\rm O} _{3}$
adhesive layer deposited by atomic layer deposition (ALD) improve its long-term stability. Test results indicate that the micro-hotplate consumes only 18 mW when heated up to 400
$^{\circ}$
C with a heating response time
$<$
5 ms and cooling response time
$<$
3 ms. It can sustain at least 842
$\thinspace$
400 circles pulsed-mode operation with ultra-low resistance drift and can continuously work stably at around 450
$^{\circ}$
C for at least 500 h.