A New Trench Power MOSFET With an Inverted L-Shaped Source Region

A new trench power MOSFET with an inverted L-shaped source region is proposed and experimentally demonstrated. The fabricated new device has a breakdown voltage of 54 V. The avalanche energy absorption of the new device at unclamped inductive switching is 2.1 times that of the fabricated conventional trench power MOSFET. This is due to the minimized n
⁺
-source/p-body junction in the structure. Moreover, the specific on-resistance of the new device is reduced by 30% due to the smaller pitch. The new device is very promising for automotive electric power steering applications.