The circular resistor (CR)-a novel structure for the analysis of VLSI contacts

The circular resistor, a structure for extracting metal-semiconductor contact resistivity, is discussed. A two-dimensional analytical solution of the system is shown in a simplified case; the complex solution is calculated by numerical simulations. Very good agreement between the two solutions was found. Regarding resolution, the circular resistor exhibits characteristics similar to those of other standard structures, but the circular shape fits the actual geometry of VLSI contacts.<
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