SOLIDIS: a tool for microactuator simulation in 3-D

SOLIDIS is an engineering software tool tailored for the coupled three-dimensional (3-D) analysis of microactuators. Surface electrostatic forces, thermomechanics, and piezoelectric effects are correctly treated. The solution algorithms implemented enable efficient and accurate static analysis and optimization of MEMS actuators. Adaptive mesh refinement results in near-optimal meshes in the sense of achieving maximum accuracy for a given number of mesh nodes. A zone partitioning scheme permits efficient simulation of complex actuator structures. Additional key issues are mesh updating using a Monte Carlo algorithm to account for the actuator's movement and the application of smoothing algorithms for the extraction of accurate electrostatic forces.